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Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B₄C target

Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B₄C target

The effect of the gas mixture composition on the structure, chemical bond character and hardness of Si–B–C–N films was systematically studied. A series of Si–B–C–N films was deposited by reactive dc magnetron sputtering of the target composed of Si disc with B₄C chips placed in the sputtering zone o...

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Bibliographic Details
Main Authors: Onoprienko, A.A., Ivashchenko, V.I., Kozak, A.O., Sinelnichenko, A.K., Tomila, T.V.
Format: Article
Language:English
Published: Інститут надтвердих матеріалів ім. В.М. Бакуля НАН України 2019
Series:Сверхтвердые материалы
Subjects:
Одержання, структура, властивості
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/167298
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http://dspace.nbuv.gov.ua/handle/123456789/167298

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