Spatial distributions of plasma parameters in ICP reactor
The results of systematic experimental researches of ICP reactor are presented. Experimental results on spatial distribution of local plasma parameters (plasma density, temperature and electron energy distribution function) and radial profiles of ion current to processed surface are presented for at...
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| Date: | 2010 |
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| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2010
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| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/17487 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Spatial distributions of plasma parameters in ICP reactor / S.V. Dudin, A.N. Dahov, V.I. Farenik // Вопросы атомной науки и техники. — 2010. — № 6. — С. 150-152. — Бібліогр.: 3 назв. — англ. |