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Integral cluster set-up for complex compound composites syntesis
At present study the result of development and investigations of cluster technological set-up for synthesis of complex compound composites is demonstrated. The present set-up consist of complimentary DC-magnetron system, RF-inductive plasma source and ion source. The system allows to independently...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2011
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/90956 |
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| Summary: | At present study the result of development and investigations of cluster technological set-up for synthesis of
complex compound composites is demonstrated. The present set-up consist of complimentary DC-magnetron system,
RF-inductive plasma source and ion source. The system allows to independently form the fluxes of metal atoms,
chemically active particles, ions and also to synthesize the thin films of complex compound composites, including
nanocomposites. Various types of high-quality coatings such as Al2O3, AlN, TiO2, TiN, ZrO2 and others with thickness
up to 10 mkm have been synthesized using the described set-up. |
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