Comparative investigation of NbN and Nb–Si–N films: experiment and theory

Comparative investigation of NbN and Nb–Si–N films: experiment and theory

NbN and Nb–Si–N films have been deposited by magnetron sputtering of the Nb and Si targets on silicon wafers at various powers supplied to the Nb target. The films have been investigated by an atomic force microscope, X-ray diffraction, X-ray photoelectron spectroscopy, nanoindentaion and microinden...

Full description

Saved in:
Bibliographic Details
Date:2014
Main Authors: Ivashchenko, V.I., Scrynskyy, P.L., Lytvyn, O.S., Butenko, O.O., Sinelnichenko, O.K., Gorb, L., Hill, F., Leszczynski, J., Kozak, A.O.
Format: Article
Language:English
Published: Інститут надтвердих матеріалів ім. В.М. Бакуля НАН України 2014
Series:Сверхтвердые материалы
Subjects:
Получение, структура, свойства
Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/126127
Tags: Add Tag
No Tags, Be the first to tag this record!
Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Comparative investigation of NbN and Nb–Si–N films: experiment and theory / V.I. Ivashchenko, P.L. Scrynskyy, O.S. Lytvyn, O.O. Butenko, O.K. Sinelnichenko, L. Gorb, F. Hill, J. Leszczynski, A.O. Kozak // Сверхтвердые материалы. — 2014. — № 6. — С. 29-43. — Бібліогр.: 37 назв. — англ.

Institution

Digital Library of Periodicals of National Academy of Sciences of Ukraine

Similar Items

Similar Items