TiN coating etching from a surface of the instrument in beam-plasma system

• Published in: Вопросы атомной науки и техники
• Date: 2000
• Main Authors: Bizyukov, A.A., Kashaba, A.Y., Sereda, K.N., Sleptsov, V.V., Danziger, М., Phiodorov, S.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2000
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/78562
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: TiN coating etching from a surface of the instrument in beam-plasma system / A.A. Bizyukov, A.Y. Kashaba, K.N. Sereda, V.V. Sleptsov, М. Danziger, S. Phiodorov // Вопросы атомной науки и техники. — 2000. — № 6. — С. 163-165. — Бібліогр.: 7 назв. — англ.

The results of reactive ion-plasma etching of TiN coatings from a surface of the tool in a beam-plasma system are submitted. The researches were made on the industrial set-up of a type «the Plasma boiler» with a magnetic field of the plug configuration. The electron guns on the basis of magnetron discharge injected from magnetic plug in a magnetic trap volume oncoming electron beams with a current density up to 2 A/cm², energy 350÷550eV. At pressure 1.10⁻³ ÷ 5.10⁻³ Torr in a magnetic trap the beam-plasma discharge was fired from which one crosswise magnetic fields an ion flow on items was extracted. As working gases the mixture Ar and CF₄ were used. The given beam-plasma system allowed selectively to remove from a surface of the tools TiN coating at speed of etching 1÷2 µm/h on the area of 12000cm².