2D fluid model for interactive development of ICP technological tools

2D fluid model for interactive development of ICP technological tools

The software for ICP device simulation is worked out. Discharge chamber geometry, RF power, pressure and working gas type are the input data. The results of calculation are inductor voltage, ion current density distribution on the chamber surface, steady state space distributions of the electric f...

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Datum:2006
Hauptverfasser: Gapon, A.V., Dahov, A.N., Dudin, S.V., Zykov, A.V., Azarenkov, N.A.
Format: Artikel
Sprache:English
Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2006
Schriftenreihe:Вопросы атомной науки и техники
Schlagworte:
Low temperature plasma and plasma technologies
Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/82306
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:2D fluid model for interactive development of ICP technological tools / A.V. Gapon, A.N. Dahov, S.V. Dudin, A.V. Zykov, N.A. Azarenkov // Вопросы атомной науки и техники. — 2006. — № 6. — С. 186-188. — Бібліогр.: 3 назв. — англ.

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spelling nasplib_isofts_kiev_ua-123456789-823062025-02-09T11:46:21Z 2D fluid model for interactive development of ICP technological tools Gapon, A.V. Dahov, A.N. Dudin, S.V. Zykov, A.V. Azarenkov, N.A. Low temperature plasma and plasma technologies The software for ICP device simulation is worked out. Discharge chamber geometry, RF power, pressure and working gas type are the input data. The results of calculation are inductor voltage, ion current density distribution on the chamber surface, steady state space distributions of the electric field, plasma density and electron temperature in the chamber. Set of 2D parameter distributions is visualized immediately after calculation. The software had been carefully verified by comparing the calculation results with real data measured experimentally. The comparison has shown that both calculated 2D plasma density and electron temperature profiles and ion current density distribution on the processed surface are quite realistic. Graphical geometry input, fast calculation and immediate result visualization makes it possible to use our software for interactive development of ICP technological tools. This work was supported by Ministry of Industrial Policy of Ukraine, Project 92373/60 2006 Article 2D fluid model for interactive development of ICP technological tools / A.V. Gapon, A.N. Dahov, S.V. Dudin, A.V. Zykov, N.A. Azarenkov // Вопросы атомной науки и техники. — 2006. — № 6. — С. 186-188. — Бібліогр.: 3 назв. — англ. 1562-6016 PACS: 52.35.Hr https://nasplib.isofts.kiev.ua/handle/123456789/82306 en Вопросы атомной науки и техники application/pdf Національний науковий центр «Харківський фізико-технічний інститут» НАН України
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
language English
topic Low temperature plasma and plasma technologies
Low temperature plasma and plasma technologies
spellingShingle Low temperature plasma and plasma technologies
Low temperature plasma and plasma technologies
Gapon, A.V.
Dahov, A.N.
Dudin, S.V.
Zykov, A.V.
Azarenkov, N.A.
2D fluid model for interactive development of ICP technological tools
Вопросы атомной науки и техники
description The software for ICP device simulation is worked out. Discharge chamber geometry, RF power, pressure and working gas type are the input data. The results of calculation are inductor voltage, ion current density distribution on the chamber surface, steady state space distributions of the electric field, plasma density and electron temperature in the chamber. Set of 2D parameter distributions is visualized immediately after calculation. The software had been carefully verified by comparing the calculation results with real data measured experimentally. The comparison has shown that both calculated 2D plasma density and electron temperature profiles and ion current density distribution on the processed surface are quite realistic. Graphical geometry input, fast calculation and immediate result visualization makes it possible to use our software for interactive development of ICP technological tools.
format Article
author Gapon, A.V.
Dahov, A.N.
Dudin, S.V.
Zykov, A.V.
Azarenkov, N.A.
author_facet Gapon, A.V.
Dahov, A.N.
Dudin, S.V.
Zykov, A.V.
Azarenkov, N.A.
author_sort Gapon, A.V.
title 2D fluid model for interactive development of ICP technological tools
title_short 2D fluid model for interactive development of ICP technological tools
title_full 2D fluid model for interactive development of ICP technological tools
title_fullStr 2D fluid model for interactive development of ICP technological tools
title_full_unstemmed 2D fluid model for interactive development of ICP technological tools
title_sort 2d fluid model for interactive development of icp technological tools
publisher Національний науковий центр «Харківський фізико-технічний інститут» НАН України
publishDate 2006
topic_facet Low temperature plasma and plasma technologies
url https://nasplib.isofts.kiev.ua/handle/123456789/82306
citation_txt 2D fluid model for interactive development of ICP technological tools / A.V. Gapon, A.N. Dahov, S.V. Dudin, A.V. Zykov, N.A. Azarenkov // Вопросы атомной науки и техники. — 2006. — № 6. — С. 186-188. — Бібліогр.: 3 назв. — англ.
series Вопросы атомной науки и техники
work_keys_str_mv AT gaponav 2dfluidmodelforinteractivedevelopmentoficptechnologicaltools
AT dahovan 2dfluidmodelforinteractivedevelopmentoficptechnologicaltools
AT dudinsv 2dfluidmodelforinteractivedevelopmentoficptechnologicaltools
AT zykovav 2dfluidmodelforinteractivedevelopmentoficptechnologicaltools
AT azarenkovna 2dfluidmodelforinteractivedevelopmentoficptechnologicaltools
first_indexed 2025-11-25T22:42:32Z
last_indexed 2025-11-25T22:42:32Z
_version_ 1849803987187924992

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