2D fluid model for interactive development of ICP technological tools
The software for ICP device simulation is worked out. Discharge chamber geometry, RF power, pressure and working
 gas type are the input data. The results of calculation are inductor voltage, ion current density distribution on the
 chamber surface, steady state space distributions o...
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| Veröffentlicht in: | Вопросы атомной науки и техники |
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| Datum: | 2006 |
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | Englisch |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2006
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/82306 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | 2D fluid model for interactive development of ICP technological tools / A.V. Gapon, A.N. Dahov, S.V. Dudin, A.V. Zykov, N.A. Azarenkov // Вопросы атомной науки и техники. — 2006. — № 6. — С. 186-188. — Бібліогр.: 3 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862556440376377344 |
|---|---|
| author | Gapon, A.V. Dahov, A.N. Dudin, S.V. Zykov, A.V. Azarenkov, N.A. |
| author_facet | Gapon, A.V. Dahov, A.N. Dudin, S.V. Zykov, A.V. Azarenkov, N.A. |
| citation_txt | 2D fluid model for interactive development of ICP technological tools / A.V. Gapon, A.N. Dahov, S.V. Dudin, A.V. Zykov, N.A. Azarenkov // Вопросы атомной науки и техники. — 2006. — № 6. — С. 186-188. — Бібліогр.: 3 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | The software for ICP device simulation is worked out. Discharge chamber geometry, RF power, pressure and working
gas type are the input data. The results of calculation are inductor voltage, ion current density distribution on the
chamber surface, steady state space distributions of the electric field, plasma density and electron temperature in the
chamber. Set of 2D parameter distributions is visualized immediately after calculation. The software had been carefully
verified by comparing the calculation results with real data measured experimentally. The comparison has shown that
both calculated 2D plasma density and electron temperature profiles and ion current density distribution on the processed
surface are quite realistic. Graphical geometry input, fast calculation and immediate result visualization makes it
possible to use our software for interactive development of ICP technological tools.
|
| first_indexed | 2025-11-25T22:42:32Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-82306 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-11-25T22:42:32Z |
| publishDate | 2006 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Gapon, A.V. Dahov, A.N. Dudin, S.V. Zykov, A.V. Azarenkov, N.A. 2015-05-27T15:26:25Z 2015-05-27T15:26:25Z 2006 2D fluid model for interactive development of ICP technological tools / A.V. Gapon, A.N. Dahov, S.V. Dudin, A.V. Zykov, N.A. Azarenkov // Вопросы атомной науки и техники. — 2006. — № 6. — С. 186-188. — Бібліогр.: 3 назв. — англ. 1562-6016 PACS: 52.35.Hr https://nasplib.isofts.kiev.ua/handle/123456789/82306 The software for ICP device simulation is worked out. Discharge chamber geometry, RF power, pressure and working
 gas type are the input data. The results of calculation are inductor voltage, ion current density distribution on the
 chamber surface, steady state space distributions of the electric field, plasma density and electron temperature in the
 chamber. Set of 2D parameter distributions is visualized immediately after calculation. The software had been carefully
 verified by comparing the calculation results with real data measured experimentally. The comparison has shown that
 both calculated 2D plasma density and electron temperature profiles and ion current density distribution on the processed
 surface are quite realistic. Graphical geometry input, fast calculation and immediate result visualization makes it
 possible to use our software for interactive development of ICP technological tools. This work was supported by Ministry of Industrial Policy
 of Ukraine, Project 92373/60 en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Low temperature plasma and plasma technologies 2D fluid model for interactive development of ICP technological tools Article published earlier |
| spellingShingle | 2D fluid model for interactive development of ICP technological tools Gapon, A.V. Dahov, A.N. Dudin, S.V. Zykov, A.V. Azarenkov, N.A. Low temperature plasma and plasma technologies |
| title | 2D fluid model for interactive development of ICP technological tools |
| title_full | 2D fluid model for interactive development of ICP technological tools |
| title_fullStr | 2D fluid model for interactive development of ICP technological tools |
| title_full_unstemmed | 2D fluid model for interactive development of ICP technological tools |
| title_short | 2D fluid model for interactive development of ICP technological tools |
| title_sort | 2d fluid model for interactive development of icp technological tools |
| topic | Low temperature plasma and plasma technologies |
| topic_facet | Low temperature plasma and plasma technologies |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/82306 |
| work_keys_str_mv | AT gaponav 2dfluidmodelforinteractivedevelopmentoficptechnologicaltools AT dahovan 2dfluidmodelforinteractivedevelopmentoficptechnologicaltools AT dudinsv 2dfluidmodelforinteractivedevelopmentoficptechnologicaltools AT zykovav 2dfluidmodelforinteractivedevelopmentoficptechnologicaltools AT azarenkovna 2dfluidmodelforinteractivedevelopmentoficptechnologicaltools |