Open Science Harvester of NAS of Ukraine

Особенности плазмохимического травления торцов крем­ние­вых плас­тин для фо­то­элек­три­чес­ких пре­об­ра­зо­ва­те­лей...

by Fedorovich, O. A., Kruglenko, M. P., Polozov, B. P.
Published 2009

About influence of energy of electrons and ions on speed of electron- and ion-stimulated plasmachemical etching of silicon

by Fedorovich, O.A., Kruglenko, M.P., Polozov, B.P.
Published 2010

Technological studies of the plasmachemical reactor with сlosed electron drift

by Fedorovich, O.A., Kruglenko, M.P., Polozov, B.P.
Published in Вопросы атомной науки и техники (2009)

About peculiarities of self-bias voltage formation in plasma-chemical reactors with controlled magnetic fields

by Hladkovskiy, V.V., Fedorovich, O.A., Polozov, B.P., Kruglenko, M.P.
Published in Вопросы атомной науки и техники (2015)

Modernized equipment for plasmachemical etching of insulation of p-n transition of photoelectric converters

by Fedorovich, O.A., Kruglenko, M.P., Lukomskij, D.V., Marinenko, A.A., Polozov, B.P.
Published in Вопросы атомной науки и техники (2007)

Plasma technologies for manufacturing of micro-strip metal detectors of ionizing radiation

by Pugatch, V.M., Perevertaylo, V.L., Fedorovich, O.A., Borisenko, A.G., Kostin, E.G., Kruglenko, M.P., Polozov, B.P., Tarasenko, L.I.
Published in Вопросы атомной науки и техники (2007)