Technological studies of the plasmachemical reactor with сlosed electron drift

von Fedorovich, O.A., Kruglenko, M.P., Polozov, B.P.
Veröffentlicht 2009

The qualitative analysis of the composition of the RF discharge plasma by means of mass-spectrometry

von Hladkovskiy, V.V., Polozov, B.P., Fedorovich, O.A.
Veröffentlicht 2016

About influence of energy of electrons and ions on speed of electron- and ion-stimulated plasmachemical etching of silicon

von Fedorovich, O.A., Kruglenko, M.P., Polozov, B.P.
Veröffentlicht 2010

About influence of energy of electrons and ions on speed of electron- and ion-stimulated plasmachemical etching of silicon

von Fedorovich, O.A., Kruglenko, M.P., Polozov, B.P.
Veröffentlicht 2010

The bias voltage and its influence on the etching rate of silicon

von Fedorovich, О.А., Hladkovskiy, V.V., Polozov, B.P., Kruglenko, М.P.
Veröffentlicht 2015

About peculiarities of self-bias voltage formation in plasma-chemical reactors with controlled magnetic fields

von Hladkovskiy, V.V., Fedorovich, O.A., Polozov, B.P., Kruglenko, M.P.
Veröffentlicht 2015

The bias voltage and its influence on the etching rate of silicon

von Fedorovich, О.А., Hladkovskiy, V.V., Polozov, B.P., Kruglenko, М.P.
Veröffentlicht 2015

Modernized equipment for plasmachemical etching of insulation of p-n transition of photoelectric converters

von Fedorovich, O.A., Kruglenko, M.P., Lukomskij, D.V., Marinenko, A.A., Polozov, B.P.
Veröffentlicht 2007

Влияние параметров ВЧ-разряда и параметров нагревателя на температуру подложки в плазмохимическом реакторе «Алмаз» для синтеза углеродных алмазоподобных пленок...

von Hladkovskiy, V. V., Kostin, E. G., Polozov, B. P., Fedorovich, O. A., Petriakov, V. A.
Veröffentlicht 2014

Features of the low energy protons interaction with molibden surface

von Fedorovich, O.A., Hladkovskyi, V.V., Polozov, B.P., Voitenko, L.M., Kostin, E.G., Rokitskyi, А.A., Oberemok, А.S.
Veröffentlicht 2019

Модуляционная поляриметрия полного внутреннего отражения, нарушенного алмазоподобными пленками

von Maximenko, L. S., Mishchuk, O. N., Matyash, I. E., Serdega, B. K., Kostin, E. G., Polozov, B. P., Fedorovich, O. A., Savinkov, G. K.
Veröffentlicht 2013

Plasma technologies for manufacturing of micro-strip metal detectors of ionizing radiation

von Pugatch, V.M., Perevertaylo, V.L., Fedorovich, O.A., Borisenko, A.G., Kostin, E.G., Kruglenko, M.P., Polozov, B.P., Tarasenko, L.I.
Veröffentlicht 2007

Рeculiarities of interaction of low-energy protons with tungsten surface

von Fedorovich, O.A., Hladkovskyi, V.V., Polozov, B.P., Voitenko, L.M., Kostin, E.G., Petriakov, V.А., Rokitskyi, А.A., Oberemok, А.S., Burdin, V.V.
Veröffentlicht 2018

Interaction of low-energy protons with aluminum surface

von Fedorovich, O.A., Hladkovskyi, V.V., Polozov, B.P., Voitenko, L.M., Kostin, E.G., Rokitskyi, А.A., Nedybaliuk, A.F., Oberemok, А.S., Burdin, V.V.
Veröffentlicht 2019