Electroreflectance spectroscopy and scanning electron microscopy study of microrelief silicon wafers with various surface pretreatments
The effect of various pretreatments on the performance of microrelief (textured) Si wafers was studied by the techniques of low-field electroreflectance spectroscopy, scanning electron microscopy, and electron diffraction. Four types of preliminary treatments were employed to prepare microrelief sur...
Збережено в:
Видавець: | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
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Дата: | 1998 |
Автори: | , , , , , |
Формат: | Стаття |
Мова: | English |
Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
1998
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Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/114672 |
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Цитувати: | Electroreflectance spectroscopy and scanning electron microscopy study of microrelief silicon wafers with various surface pretreatments / T.Ya. Gorbach, R.Yu. Holiney, I.M. Matiyuk, L.A. Matveeva, S.V. Svechnikov, E.F. Venger // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1998. — Т. 1, № 1. — С. 66-70. — Бібліогр.: 9 назв. — англ. |
Репозиторії
Digital Library of Periodicals of National Academy of Sciences of UkraineРезюме: | The effect of various pretreatments on the performance of microrelief (textured) Si wafers was studied by the techniques of low-field electroreflectance spectroscopy, scanning electron microscopy, and electron diffraction. Four types of preliminary treatments were employed to prepare microrelief surfaces by anisotropic chemical etching: (i) cutting, (ii) cutting and mechanical polishing with Al₂O₃, (iii) cutting and chemical polishing with HNO₃:HF, and (iv) the standard industrial technique. Using the critical point energy Eg at the central point in the Brillouin zone (GIV₂₅ – GC₁₅ transition) and the phenomenological parameter of broading G to characterize the performance of the Si surface, it was found that anisotropic chemical etching performed after cutting produced the surface performance comparable to that of industrially fabricated wafers, but at a lower cost. |
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