2025-02-22T16:22:00-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-117723%22&qt=morelikethis&rows=5
2025-02-22T16:22:00-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-117723%22&qt=morelikethis&rows=5
2025-02-22T16:22:00-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-22T16:22:00-05:00 DEBUG: Deserialized SOLR response
Structural properties of nanocomposite SiO₂(Si) films obtained by ion-plasma sputtering and thermal annealing

Structural properties of nanocomposite SiO₂(Si) films obtained by ion-plasma sputtering and thermal annealing

The nanocomposite SiO₂(Si) films containing Si nanoclusters inside insulating SiO₂matrix are promising for many nanoelectronics applications. The ion-plasma sputtering of Si in O₂ containing gas mixture and following thermal annealing have been used to form nanocomposite SiO₂(Si) films. The structur...

Full description

Saved in:
Bibliographic Details
Main Authors: Bratus, O.L., Evtukh, A.A., Lytvyn, O.S., Voitovych, M.V., Yukhymchuk, V.О.
Format: Article
Language:English
Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2011
Series:Semiconductor Physics Quantum Electronics & Optoelectronics
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/117723
Tags: Add Tag
No Tags, Be the first to tag this record!

Internet

http://dspace.nbuv.gov.ua/handle/123456789/117723

Similar Items