2025-02-22T16:55:12-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-194836%22&qt=morelikethis&rows=5
2025-02-22T16:55:12-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-194836%22&qt=morelikethis&rows=5
2025-02-22T16:55:12-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-22T16:55:12-05:00 DEBUG: Deserialized SOLR response
Hydrogen reduction of silicon tetrachloride in low temperature non-equilibrium plasma of induction RF discharge
In this work, silicon is obtained by plasma-chemical reduction of silicon tetrachloride in an argon-hydrogen low- temperature nonequilibrium plasma. It is shown that in the investigated range of process parameters, the energy cost of producing one kilogram of silicon is in the range of 150…190 kW/h...
Saved in:
Main Authors: | , , , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2019
|
Series: | Вопросы атомной науки и техники |
Subjects: | |
Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/194836 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|