2025-02-22T17:28:19-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-82306%22&qt=morelikethis&rows=5
2025-02-22T17:28:19-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-82306%22&qt=morelikethis&rows=5
2025-02-22T17:28:19-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-22T17:28:19-05:00 DEBUG: Deserialized SOLR response
2D fluid model for interactive development of ICP technological tools
The software for ICP device simulation is worked out. Discharge chamber geometry, RF power, pressure and working gas type are the input data. The results of calculation are inductor voltage, ion current density distribution on the chamber surface, steady state space distributions of the electric f...
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| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2006
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/82306 |
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