The qualitative analysis of the composition of the RF discharge plasma by means of mass-spectrometry
In this paper presents the research results of mass-spectroscopy of the RF discharge plasma in the controlled magnetic fields. The discharge was conducted in the gases containing halogens and mixtures with the oxygen. The evolution of the main plasma components from the oxygen content was investig...
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| Date: | 2016 |
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| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2016
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/115471 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | The qualitative analysis of the composition of the RF discharge plasma by means of mass-spectrometry / V.V. Hladkovskiy, B.P. Polozov, O.A. Fedorovich // Вопросы атомной науки и техники. — 2016. — № 6. — С. 314-316. — Бібліогр.: 5 назв. — англ. |