Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering

Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering

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Bibliographic Details
Date:2016
Main Authors: V. I. Popovych, A. I. Ievtushenko, O. S. Lytvyn, V. R. Romanjuk, V. M. Tkach, V. A. Baturyn, O. Y. Karpenko, M. V. Dranchuk, L. O. Klochkov, M. G. Dushejko, V. A. Karpyna, G. V. Lashkarov
Format: Article
Language:English
Published: 2016
Series:Ukrainian journal of physics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000727569
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-523962024-02-29T13:06:21Z Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering V. I. Popovych A. I. Ievtushenko O. S. Lytvyn V. R. Romanjuk V. M. Tkach V. A. Baturyn O. Y. Karpenko M. V. Dranchuk L. O. Klochkov M. G. Dushejko V. A. Karpyna G. V. Lashkarov 2071-0186 2016 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0000727569 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Ukrainian journal of physics
spellingShingle Ukrainian journal of physics
V. I. Popovych
A. I. Ievtushenko
O. S. Lytvyn
V. R. Romanjuk
V. M. Tkach
V. A. Baturyn
O. Y. Karpenko
M. V. Dranchuk
L. O. Klochkov
M. G. Dushejko
V. A. Karpyna
G. V. Lashkarov
Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering
format Article
author V. I. Popovych
A. I. Ievtushenko
O. S. Lytvyn
V. R. Romanjuk
V. M. Tkach
V. A. Baturyn
O. Y. Karpenko
M. V. Dranchuk
L. O. Klochkov
M. G. Dushejko
V. A. Karpyna
G. V. Lashkarov
author_facet V. I. Popovych
A. I. Ievtushenko
O. S. Lytvyn
V. R. Romanjuk
V. M. Tkach
V. A. Baturyn
O. Y. Karpenko
M. V. Dranchuk
L. O. Klochkov
M. G. Dushejko
V. A. Karpyna
G. V. Lashkarov
author_sort V. I. Popovych
title Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering
title_short Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering
title_full Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering
title_fullStr Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering
title_full_unstemmed Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering
title_sort effect of argon deposition pressure on the properties of aluminum-doped zno films deposited layer-by-layer using magnetron sputtering
publishDate 2016
url http://jnas.nbuv.gov.ua/article/UJRN-0000727569
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first_indexed 2025-07-17T23:02:35Z
last_indexed 2025-07-17T23:02:35Z
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