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About peculiarities of self-bias voltage formation in plasma-chemical reactors with controlled magnetic fields
The peculiarities of self-bias voltage formation in plasma-chemical reactors (PCR) with controlled magnetic fields have been investigated. The dependences of self-bias voltages on the values and configurations of magnetic fields in PCR, as well as, on the pressures, gas flows, discharge currents, di...
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Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Institute for Nuclear Research of NASU
2015
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Series: | Вопросы атомной науки и техники |
Subjects: | |
Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/82118 |
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