Structural and electrical-physical properties of the ohmic contacts based on palladium to n⁺ -n-n⁺⁺ -n⁺⁺⁺ -InP
Presented in this paper are experimental data on structural properties of contact metallization and temperature dependence of the specific contact resistance for ohmic contacts Au–Ti–Pd–n⁺-InP and Au–Ti–Ge–Pd-n⁺-InP prepared using the method of successive thermal evaporation of metals in oil-free va...
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| Опубліковано в: : | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Дата: | 2015 |
| Автори: | , , , , , , , , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2015
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| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/121259 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Structural and electrical-physical properties of the ohmic contacts based on palladium to n⁺ -n-n⁺⁺ -n⁺⁺⁺ -InP / A.E. Belyaev, N.A. Boltovets, A.B. Bobyl, V.P. Kladko, R.V. Konakova, Ya.Ya. Kudryk, M.U. Nasyrov, A.V. Sachenko, V.S. Slipokurov, A.S. Slepova, N.V. Safryuk, A.I. Gudymenko, V.V. Shynkarenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2015. — Т. 18, № 4. — С. 391-395. — Бібліогр.: 18 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862599426775711744 |
|---|---|
| author | Belyaev, A.E. Boltovets, N.A. Bobyl, A.B. Kladko, V.P. Konakova, R.V. Kudryk, Ya.Ya. Nasyrov, M.U. Sachenko, A.V. Slipokurov, V.S. Slepova, A.S. Safryuk, N.V. Gudymenko, A.I. Shynkarenko, V.V. |
| author_facet | Belyaev, A.E. Boltovets, N.A. Bobyl, A.B. Kladko, V.P. Konakova, R.V. Kudryk, Ya.Ya. Nasyrov, M.U. Sachenko, A.V. Slipokurov, V.S. Slepova, A.S. Safryuk, N.V. Gudymenko, A.I. Shynkarenko, V.V. |
| citation_txt | Structural and electrical-physical properties of the ohmic contacts based on palladium to n⁺ -n-n⁺⁺ -n⁺⁺⁺ -InP / A.E. Belyaev, N.A. Boltovets, A.B. Bobyl, V.P. Kladko, R.V. Konakova, Ya.Ya. Kudryk, M.U. Nasyrov, A.V. Sachenko, V.S. Slipokurov, A.S. Slepova, N.V. Safryuk, A.I. Gudymenko, V.V. Shynkarenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2015. — Т. 18, № 4. — С. 391-395. — Бібліогр.: 18 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | Presented in this paper are experimental data on structural properties of contact metallization and temperature dependence of the specific contact resistance for ohmic contacts Au–Ti–Pd–n⁺-InP and Au–Ti–Ge–Pd-n⁺-InP prepared using the method of successive thermal evaporation of metals in oil-free vacuum in one process cycle onto the n⁺-n-n⁺⁺-n⁺⁺⁺-InP epitaxial structure heated to 300 °C. It has been theoretically and experimentally shown that within the temperature range 250…380 K the current transport mechanism in the ohmic contacts Au–Ti–Pd–n⁺-InP is thermal-field one, and in the ohmic contacts Au–Ti–Ge–Pd-n⁺-InP it is caused by conductivity along metal shunts linked with dislocations. According to the X-ray diffraction data, the density of these dislocations in the near-contact InP area is ~10⁹ cm⁻².
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| first_indexed | 2025-11-27T22:35:38Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-121259 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-11-27T22:35:38Z |
| publishDate | 2015 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Belyaev, A.E. Boltovets, N.A. Bobyl, A.B. Kladko, V.P. Konakova, R.V. Kudryk, Ya.Ya. Nasyrov, M.U. Sachenko, A.V. Slipokurov, V.S. Slepova, A.S. Safryuk, N.V. Gudymenko, A.I. Shynkarenko, V.V. 2017-06-13T18:09:09Z 2017-06-13T18:09:09Z 2015 Structural and electrical-physical properties of the ohmic contacts based on palladium to n⁺ -n-n⁺⁺ -n⁺⁺⁺ -InP / A.E. Belyaev, N.A. Boltovets, A.B. Bobyl, V.P. Kladko, R.V. Konakova, Ya.Ya. Kudryk, M.U. Nasyrov, A.V. Sachenko, V.S. Slipokurov, A.S. Slepova, N.V. Safryuk, A.I. Gudymenko, V.V. Shynkarenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2015. — Т. 18, № 4. — С. 391-395. — Бібліогр.: 18 назв. — англ. 1560-8034 DOI: 10.15407/spqeo18.04.391 PACS 73.40.Ns https://nasplib.isofts.kiev.ua/handle/123456789/121259 Presented in this paper are experimental data on structural properties of contact metallization and temperature dependence of the specific contact resistance for ohmic contacts Au–Ti–Pd–n⁺-InP and Au–Ti–Ge–Pd-n⁺-InP prepared using the method of successive thermal evaporation of metals in oil-free vacuum in one process cycle onto the n⁺-n-n⁺⁺-n⁺⁺⁺-InP epitaxial structure heated to 300 °C. It has been theoretically and experimentally shown that within the temperature range 250…380 K the current transport mechanism in the ohmic contacts Au–Ti–Pd–n⁺-InP is thermal-field one, and in the ohmic contacts Au–Ti–Ge–Pd-n⁺-InP it is caused by conductivity along metal shunts linked with dislocations. According to the X-ray diffraction data, the density of these dislocations in the near-contact InP area is ~10⁹ cm⁻². en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Structural and electrical-physical properties of the ohmic contacts based on palladium to n⁺ -n-n⁺⁺ -n⁺⁺⁺ -InP Article published earlier |
| spellingShingle | Structural and electrical-physical properties of the ohmic contacts based on palladium to n⁺ -n-n⁺⁺ -n⁺⁺⁺ -InP Belyaev, A.E. Boltovets, N.A. Bobyl, A.B. Kladko, V.P. Konakova, R.V. Kudryk, Ya.Ya. Nasyrov, M.U. Sachenko, A.V. Slipokurov, V.S. Slepova, A.S. Safryuk, N.V. Gudymenko, A.I. Shynkarenko, V.V. |
| title | Structural and electrical-physical properties of the ohmic contacts based on palladium to n⁺ -n-n⁺⁺ -n⁺⁺⁺ -InP |
| title_full | Structural and electrical-physical properties of the ohmic contacts based on palladium to n⁺ -n-n⁺⁺ -n⁺⁺⁺ -InP |
| title_fullStr | Structural and electrical-physical properties of the ohmic contacts based on palladium to n⁺ -n-n⁺⁺ -n⁺⁺⁺ -InP |
| title_full_unstemmed | Structural and electrical-physical properties of the ohmic contacts based on palladium to n⁺ -n-n⁺⁺ -n⁺⁺⁺ -InP |
| title_short | Structural and electrical-physical properties of the ohmic contacts based on palladium to n⁺ -n-n⁺⁺ -n⁺⁺⁺ -InP |
| title_sort | structural and electrical-physical properties of the ohmic contacts based on palladium to n⁺ -n-n⁺⁺ -n⁺⁺⁺ -inp |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/121259 |
| work_keys_str_mv | AT belyaevae structuralandelectricalphysicalpropertiesoftheohmiccontactsbasedonpalladiumtonnnninp AT boltovetsna structuralandelectricalphysicalpropertiesoftheohmiccontactsbasedonpalladiumtonnnninp AT bobylab structuralandelectricalphysicalpropertiesoftheohmiccontactsbasedonpalladiumtonnnninp AT kladkovp structuralandelectricalphysicalpropertiesoftheohmiccontactsbasedonpalladiumtonnnninp AT konakovarv structuralandelectricalphysicalpropertiesoftheohmiccontactsbasedonpalladiumtonnnninp AT kudrykyaya structuralandelectricalphysicalpropertiesoftheohmiccontactsbasedonpalladiumtonnnninp AT nasyrovmu structuralandelectricalphysicalpropertiesoftheohmiccontactsbasedonpalladiumtonnnninp AT sachenkoav structuralandelectricalphysicalpropertiesoftheohmiccontactsbasedonpalladiumtonnnninp AT slipokurovvs structuralandelectricalphysicalpropertiesoftheohmiccontactsbasedonpalladiumtonnnninp AT slepovaas structuralandelectricalphysicalpropertiesoftheohmiccontactsbasedonpalladiumtonnnninp AT safryuknv structuralandelectricalphysicalpropertiesoftheohmiccontactsbasedonpalladiumtonnnninp AT gudymenkoai structuralandelectricalphysicalpropertiesoftheohmiccontactsbasedonpalladiumtonnnninp AT shynkarenkovv structuralandelectricalphysicalpropertiesoftheohmiccontactsbasedonpalladiumtonnnninp |