Investigation of resistance formation mechanisms for contacts to n-AlN and n-GaN with a high dislocation density

We studied temperature dependences of the resistivity, Pc(T) , of Pd-Ti-Pd-Au
 ohmic contacts to wide-gap semiconductors n - GaN and n - AlN with a high
 dislocation density. BothPc(T) curves have portions of exponential decrease, as well as
 those with very slight Pc(T) d...

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Опубліковано в: :Semiconductor Physics Quantum Electronics & Optoelectronics
Дата:2012
Автори: Sachenko, A.V., Belyaev, A.E., Boltovets, N.S., Zhilyaev, Yu.V., Kapitanchuk, L.M., Klad’ko, V.P., Konakova, R.V., Kudryk, Ya.Ya., Kuchuk, A.V., Naumov, A.V., Panteleev, V.V., Sheremet, V.N.
Формат: Стаття
Мова:Англійська
Опубліковано: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2012
Онлайн доступ:https://nasplib.isofts.kiev.ua/handle/123456789/118725
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Investigation of resistance formation mechanisms for contacts
 to n-AlN and n-GaN with a high dislocation density / A.V. Sachenko, A.E. Belyaev, N.S. Boltovets, Yu.V. Zhilyaev, L.M. Kapitanchuk, V.P. Klad’ko, R.V. Konakova, Ya.Ya. Kudryk, A.V. Kuchuk, A.V. Naumov, V.V. Panteleev, V.N. Sheremet // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2012. — Т. 15, № 4. — С. 351-357. — Бібліогр.: 19 назв. — англ.

Репозитарії

Digital Library of Periodicals of National Academy of Sciences of Ukraine
_version_ 1862530546487263232
author Sachenko, A.V.
Belyaev, A.E.
Boltovets, N.S.
Zhilyaev, Yu.V.
Kapitanchuk, L.M.
Klad’ko, V.P.
Konakova, R.V.
Kudryk, Ya.Ya.
Kuchuk, A.V.
Naumov, A.V.
Panteleev, V.V.
Sheremet, V.N.
author_facet Sachenko, A.V.
Belyaev, A.E.
Boltovets, N.S.
Zhilyaev, Yu.V.
Kapitanchuk, L.M.
Klad’ko, V.P.
Konakova, R.V.
Kudryk, Ya.Ya.
Kuchuk, A.V.
Naumov, A.V.
Panteleev, V.V.
Sheremet, V.N.
citation_txt Investigation of resistance formation mechanisms for contacts
 to n-AlN and n-GaN with a high dislocation density / A.V. Sachenko, A.E. Belyaev, N.S. Boltovets, Yu.V. Zhilyaev, L.M. Kapitanchuk, V.P. Klad’ko, R.V. Konakova, Ya.Ya. Kudryk, A.V. Kuchuk, A.V. Naumov, V.V. Panteleev, V.N. Sheremet // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2012. — Т. 15, № 4. — С. 351-357. — Бібліогр.: 19 назв. — англ.
collection DSpace DC
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description We studied temperature dependences of the resistivity, Pc(T) , of Pd-Ti-Pd-Au
 ohmic contacts to wide-gap semiconductors n - GaN and n - AlN with a high
 dislocation density. BothPc(T) curves have portions of exponential decrease, as well as
 those with very slight Pc(T) dependence at higher temperatures. Besides, the Au-Pd-TiPd-n-GaN
 contacts have a portion of Pc(T) flattening out in the low-temperature region.
 This portion appears only after rapid thermal annealing (RTA). In principle, its
 appearance may be caused by preliminary heavy doping of the near-contact region with a
 shallow donor impurity as well as doping in the course of contact formation owing to
 RTA, if the contact-forming layer involves a material atoms of which serve as shallow
 donors in III  N compounds. The obtained Pc(T) dependences cannot be explained by
 the existing mechanisms of current transfer. We propose other mechanisms explaining
 the experimental Pc(T) curves for ohmic contacts to n - GaN and n -AlN .
first_indexed 2025-11-24T02:23:33Z
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language English
last_indexed 2025-11-24T02:23:33Z
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publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
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spelling Sachenko, A.V.
Belyaev, A.E.
Boltovets, N.S.
Zhilyaev, Yu.V.
Kapitanchuk, L.M.
Klad’ko, V.P.
Konakova, R.V.
Kudryk, Ya.Ya.
Kuchuk, A.V.
Naumov, A.V.
Panteleev, V.V.
Sheremet, V.N.
2017-05-31T05:22:26Z
2017-05-31T05:22:26Z
2012
Investigation of resistance formation mechanisms for contacts
 to n-AlN and n-GaN with a high dislocation density / A.V. Sachenko, A.E. Belyaev, N.S. Boltovets, Yu.V. Zhilyaev, L.M. Kapitanchuk, V.P. Klad’ko, R.V. Konakova, Ya.Ya. Kudryk, A.V. Kuchuk, A.V. Naumov, V.V. Panteleev, V.N. Sheremet // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2012. — Т. 15, № 4. — С. 351-357. — Бібліогр.: 19 назв. — англ.
1560-8034
PACS 73.40.Cg, 73.40.Ns, 85.40.-e
https://nasplib.isofts.kiev.ua/handle/123456789/118725
We studied temperature dependences of the resistivity, Pc(T) , of Pd-Ti-Pd-Au
 ohmic contacts to wide-gap semiconductors n - GaN and n - AlN with a high
 dislocation density. BothPc(T) curves have portions of exponential decrease, as well as
 those with very slight Pc(T) dependence at higher temperatures. Besides, the Au-Pd-TiPd-n-GaN
 contacts have a portion of Pc(T) flattening out in the low-temperature region.
 This portion appears only after rapid thermal annealing (RTA). In principle, its
 appearance may be caused by preliminary heavy doping of the near-contact region with a
 shallow donor impurity as well as doping in the course of contact formation owing to
 RTA, if the contact-forming layer involves a material atoms of which serve as shallow
 donors in III  N compounds. The obtained Pc(T) dependences cannot be explained by
 the existing mechanisms of current transfer. We propose other mechanisms explaining
 the experimental Pc(T) curves for ohmic contacts to n - GaN and n -AlN .
This work was supported by the State Target Scientific
 and Technical Program of Ukraine “Nanotechnologies
 and nanomaterials” for 2010-2014.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Investigation of resistance formation mechanisms for contacts to n-AlN and n-GaN with a high dislocation density
Article
published earlier
spellingShingle Investigation of resistance formation mechanisms for contacts to n-AlN and n-GaN with a high dislocation density
Sachenko, A.V.
Belyaev, A.E.
Boltovets, N.S.
Zhilyaev, Yu.V.
Kapitanchuk, L.M.
Klad’ko, V.P.
Konakova, R.V.
Kudryk, Ya.Ya.
Kuchuk, A.V.
Naumov, A.V.
Panteleev, V.V.
Sheremet, V.N.
title Investigation of resistance formation mechanisms for contacts to n-AlN and n-GaN with a high dislocation density
title_full Investigation of resistance formation mechanisms for contacts to n-AlN and n-GaN with a high dislocation density
title_fullStr Investigation of resistance formation mechanisms for contacts to n-AlN and n-GaN with a high dislocation density
title_full_unstemmed Investigation of resistance formation mechanisms for contacts to n-AlN and n-GaN with a high dislocation density
title_short Investigation of resistance formation mechanisms for contacts to n-AlN and n-GaN with a high dislocation density
title_sort investigation of resistance formation mechanisms for contacts to n-aln and n-gan with a high dislocation density
url https://nasplib.isofts.kiev.ua/handle/123456789/118725
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